Denton
Vacuum designs and manufactures systems to deposit ultra-thin
metallic and dielectric coatings. These coatings are used in
industrial and research applications ranging from optics, semiconductors,
electro-optics, display, tribology, medical devices, to telecommunications.
The ultra high purity required for the films that are in many
cases just a few atoms thick, require that the deposition processes
occur in a vacuum. Denton Vacuum is an organization based on
and driven by process know-how. Denton's 130+ man-years of process
engineering expertise in evaporation, sputtering and ion-assisted
processes is the foundation on which the company has been built.
In general,
the deposition technologies practiced by Denton Vacuum fall into four broad
categories:
- Electron-Beam
Evaporation per trillion
- Thermal
Evaporation
- Sputtering,
Ion Beam Sputtering
- Plasma
Enhanced Chemical Vapor Deposition (PECVD)
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